Figure 1: Equilibrium and deformed states of particles in a solid body [2]

Figure 2: Direct and inverse piezoelectric effect

Figure 3: Bulk acoustic wave resonator used in this paper (not drawn to scale)

Figure 4: Quality factor in COMSOL Multiphysics

Figure 5: Admittance for PZD A-ZnO, B-AIN, C-LiNbO3, thickness (μm) = 16.7, Metal (Al) = 0.2, Silicon = 6.9

Figure 6: Admittance for PZD A-ZnO, B-AIN C- LiNbO3, thickness (μm) = 13, Metal (Al) = 0.2, Silicon = 6.9

Figure 7: Quality factor for PZD A-ZnO, B-AIN C- LiNbO3, thickness (μm) = 16.7, Metal (Al) = 0.2, Silicon = 6.9

Figure 8: Stress v/s % of Elongation (16% Al2O3)

 

Bottom electrode

Top electrode

Piezoelectric layer

Substrate

Width

800um

500um

800um

800um

Height

0.2um

0,2um

16.7um (Varied)

6,9um

Table 1:Dimensions of different layers of the studied structure

Table 2: Properties of Aluminium Nitride AIN

Table 3: Properties of Lithium Niobate LiNbO3

Table 4: Properties of Zinc Oxyde ZnO

Table 5: Properties of Aluminium Al